TRIS(DIMETHYLAMINO)SILANE
Tris(dimethylamino)silane
CAS: 15112-89-7
Molecular Formula: C6H19N3Si
TRIS(DIMETHYLAMINO)SILANE - Names and Identifiers
TRIS(DIMETHYLAMINO)SILANE - Physico-chemical Properties
| Molecular Formula | C6H19N3Si |
| Molar Mass | 161.32 |
| Density | 0,838 g/cm3 |
| Boling Point | 145 °C |
| Flash Point | 25°C |
| Appearance | liquid |
| Specific Gravity | 0.84 |
| Color | colorless to light yellow |
| pKa | 10.93±0.70(Predicted) |
| Storage Condition | Room Temprature |
| Sensitive | 8: reacts rapidly with moisture, water, protic solvents |
| Refractive Index | 1.4247 |
TRIS(DIMETHYLAMINO)SILANE - Risk and Safety
| Risk Codes | R10 - Flammable R36/37/38 - Irritating to eyes, respiratory system and skin. R52/53 - Harmful to aquatic organisms, may cause long-term adverse effects in the aquatic environment. R34 - Causes burns R29 - Contact with water liberates toxic gas R20 - Harmful by inhalation R15 - Contact with water liberates extremely flammable gases R11 - Highly Flammable |
| Safety Description | S16 - Keep away from sources of ignition. S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.) S43 - In case of fire use ... (there follows the type of fire-fighting equipment to be used.) |
| UN IDs | 1993 |
| WGK Germany | 3 |
| RTECS | VV5800000 |
| TSCA | Yes |
TRIS(DIMETHYLAMINO)SILANE - Reference Information
| EPA chemical information | Information provided by: ofmpub.epa.gov (external link) |
| product characteristics | related studies show that tris (dimethylamino) silane as a precursor source not only has better stability and higher vapor pressure, but also shows quite high reactivity, so this silicone source has become a hot spot in the research of ALD method deposition of SiO2. |
| Preparation | A method for preparing tris (dimethylamine) silane, which includes the following steps: under the protection of an inert atmosphere, adding dimethylamine and hydrocarbon in the reactor Solvent, and then adding an organolithium compound to the system to obtain a lithium salt of dimethylamine; adding trichlorosilane to the system; distilled after the reaction, tris (dimethylaminoyl) silane is obtained. |
Last Update：2024-04-09 02:00:07
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