| Name | Hexafluorodisilane |
| Synonyms | 13830-68-7 Hexafluorodisilane trifluoro(trifluorosilyl)silane |
| CAS | 13830-68-7 |
| Molecular Formula | F6Si2 |
| Molar Mass | 170.16 |
| Melting Point | -18.5°C sub. |
| Specific Gravity | 1.282 |
| Sensitive | 8: reacts rapidly with moisture, water, protic solvents |